Cross-validation of Competitive Associative Nets for Stable Temperature Control of Rca Cleaning Solutions
نویسندگان
چکیده
For cleaning silicon wafers via the RCA clean, temperature control is important for stable cleaning performance, but difficult owing that the RCA solutions expose nonlinear and time-varying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 has been developed and the effectiveness has been validated, where however we have observed that the control performance such as overshoot and settling time does not always improved as the number of learning iterations increases when using multiple units of the CAN2. So, we apply the cross-validation scheme to selecting the number of units of the CAN2 for stable control over learning iterations, and we examine the effectiveness of this method by the computer simulation.
منابع مشابه
Ensemble of Competitive Associative Nets for Stable Learning Performance in Temperature Control of RCA Cleaning Solutions
For cleaning silicon wafers via the RCA clean, temperature control is important in order to obtain a stable performance, but it is difficult mainly because the RCA solutions expose nonlinear and timevarying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 (competitive associative net 2) has been developed and the effectiveness has been valid...
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